METAL OXIDE METAL CAPACITOR WITH SLOT VIAS

摘要

A capacitor includes a first electrode including a plurality of first conductive lines, at least one first via, and at least one second via. The first conductive lines are parallel and connected to a first periphery conductive line. The first conductor lines in adjacent layers are coupled by the at least one first and second via. The at least one first via has a first length, and the at least one second via has a second length. The capacitor includes a second electrode opposite to the first electrode. The second electrode includes a plurality of second conductive lines and at least one third via. The second conductive lines are parallel and connected to a second periphery conductive line. The second conductor lines in adjacent layers are coupled by the at least one third via. The capacitor includes at least one oxide layer between the first electrode and the second electrode.