发明名称 PROCESS FOR IMPRINT PATTERNING MATERIALS IN THIN-FILM DEVICES
摘要 <p>The present disclosure provides a method for patterning materials that are or are on top of chemically sensitive organic semiconductors. The method employs imprint lithography and a bilayer resist structure that simultaneously protects lower layers from harmful solvents and allows for cleaner liftoff by producing an undercut geometry to the resist pattern.</p>
申请公布号 WO2013074617(A1) 申请公布日期 2013.05.23
申请号 WO2012US65000 申请日期 2012.11.14
申请人 ORTHOGONAL, INC. 发明人 DEFRANCO, JOHN
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
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