Method for preparation of needle tip for atom probe tomography, involves guiding through hole of planar drain electrode into measuring position based on measured coordinates of sample for performing tomography by manipulator

摘要

#CMT# #/CMT# The method involves transferring a carrier element together with a sample from a preparation chamber (1) into a measuring chamber (2) through a transfer channel (3). The carrier element in the measuring chamber is fastened at a measuring desk, which comprises a layer made of sapphire. A through hole of a planar drain electrode is guided into a measuring position based on measured coordinates of the sample for performing tomography by a manipulator fastened at the carrier element, where the planar drain electrode is carried by the manipulator. #CMT# : #/CMT# Independent claims are also included for the following: (1) a carrier element (2) a measuring chamber for atom probe tomography. #CMT#USE : #/CMT# Method for preparation of an acicular sample i.e. needle tip, for an atom probe tomography. #CMT#ADVANTAGE : #/CMT# The method prevents contamination of the sample and/or the measuring chamber due to ion bombardment with a molding of the sample in the preparation chamber. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a perspective view of an arrangement of an atom probe comprising a preparation chamber and a vacuum-technical measuring chamber. 1 : Preparation chamber 2 : Measuring chamber 3 : Transfer channel 4 : Vacuum feedthrough #CMT#METALLURGY : #/CMT# The measuring desk comprises upper and lower desk elements made of copper.