| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance performance of a functional device, or simplification and energy saving in the manufacturing process of such a high performance functional device. <P>SOLUTION: This method for producing the functional device involves a die-pressing step and a functional-solid-material layer formation step. In the die-pressing step, a functional-solid-material precursor layer, which employs a functional-solid-material precursor solution as a starting material, is subjected to a die-pressing process in a manner such that, during at least a portion of time within a period in which a die for forming a die-pressed structure is pressed against the functional-solid-material precursor layer, the first temperature of a heat source that supplies heat to the functional-solid-material precursor layer is higher than the second temperature of the functional-solid-material precursor layer. In the functional-solid-material layer formation step, a functional solid material layer is formed from the functional-solid-material precursor layer by subjecting the functional-solid-material precursor layer to a heat treatment at a third temperature that is higher than the first temperature in an oxygen-containing atmosphere after the die-pressing step. <P>COPYRIGHT: (C)2013,JPO&INPIT |
