| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a planar type electromagnetic actuator capable of effectively attaining large amplitude of a movable plate by enhancing static magnetic field intensity without increasing power consumption. <P>SOLUTION: A planar type electromagnetic actuator 10 comprises: a chip 1 including a frame part 1a, a movable plate 1c rotatably supported by torsion bars 1b and 1b to the frame part 1a and a drive coil 1d placed on the movable plate 1c and generating a magnetic field by energization; and a pair of first static magnetic field generating means 2 and 2 arranged so as to sandwich the chip 1 from the outside of the frame part 1a to apply a static magnetic field to the drive coil 1d from a direction orthogonal to the axial direction of the torsion bars 1b and 1b. The pair of first static magnetic field generating means 2 and 2 are arranged to oppose magnetic pole surfaces with different polarities, and second static magnetic field generating means 4 is arranged between the pair of first static magnetic field generating means and generates a static magnetic field in a direction opposite to a direction of a static magnetic field between the pair of first static magnetic field generating means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
