| 摘要 |
A method for controlling a micro-mirror, having the following: generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; modulating the second control signal by binary modulation of the second control signal, at the first frequency; and controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.
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