发明名称 |
Substrate Conveyance Method and Substrate Conveyance System |
摘要 |
[Object] To provide a wafer conveyance method and a wafer conveyance system that are able to quickly transfer a wafer without losing positional accuracy. [Solving Means] Using an electrostatic chuck mechanism in the holding of a wafer (W) by the holding surface (210) of a conveyance robot, the wafer (W) is transferred from a supporting surface (303) to the holding surface (210) in the state where an electrostatic attraction force is generated at the holding surface (210). As a result, since it is possible to hold the wafer by means of the electrostatic attraction force starting immediately after the wafer (W) has been transferred to the holding surface (210), it is possible to rapidly execute a wafer (W) conveying operation and thus it is possible to reduce the conveying time of the wafer between processing chambers.
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申请公布号 |
US2013129462(A1) |
申请公布日期 |
2013.05.23 |
申请号 |
US201113812745 |
申请日期 |
2011.07.25 |
申请人 |
MINAMI HIROFUMI;MUSHA KAZUHIRO;ULVAC, INC. |
发明人 |
MINAMI HIROFUMI;MUSHA KAZUHIRO |
分类号 |
B65G47/92 |
主分类号 |
B65G47/92 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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