发明名称 CURABLE COMPOSITION, COMPOSITION FOR APPLICATION, CURED FILM, LASER PROCESSING METHOD, AND MANUFACTURING METHOD FOR MULTI-LAYER WIRING STRUCTURE
摘要 The purpose of the present invention is to provide a curable composition from which a cured film with low permittivity, low water absorbance, and laser processability can be obtained, a laser processing method for the cured layer, and a manufacturing method for a multi-layer wiring structure. Provided are a curable composition containing a fluorine-containing polyarylene prepolymer (A) with a cross-linked functional group; a laser processing method wherein part of the cured film is removed by radiating laser light onto the cured film obtained by curing this composition; and a manufacturing method for a multi-layer wiring structure comprising a step for forming a via hole in an insulating film comprising the cured film by means of said processing method.
申请公布号 WO2013073638(A1) 申请公布日期 2013.05.23
申请号 WO2012JP79704 申请日期 2012.11.15
申请人 ASAHI GLASS COMPANY, LIMITED 发明人 ITO, MASAHIRO;TSURUOKA, KAORI;KUWANA, YASUHIRO;NAGAI, YUSUKE
分类号 C08F290/06;B23K26/00;B23K26/36;B23K26/38;C08L71/10;H01L21/302;H01L21/312;H01L21/768;H01L23/532 主分类号 C08F290/06
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