发明名称 |
CURABLE COMPOSITION, COMPOSITION FOR APPLICATION, CURED FILM, LASER PROCESSING METHOD, AND MANUFACTURING METHOD FOR MULTI-LAYER WIRING STRUCTURE |
摘要 |
The purpose of the present invention is to provide a curable composition from which a cured film with low permittivity, low water absorbance, and laser processability can be obtained, a laser processing method for the cured layer, and a manufacturing method for a multi-layer wiring structure. Provided are a curable composition containing a fluorine-containing polyarylene prepolymer (A) with a cross-linked functional group; a laser processing method wherein part of the cured film is removed by radiating laser light onto the cured film obtained by curing this composition; and a manufacturing method for a multi-layer wiring structure comprising a step for forming a via hole in an insulating film comprising the cured film by means of said processing method. |
申请公布号 |
WO2013073638(A1) |
申请公布日期 |
2013.05.23 |
申请号 |
WO2012JP79704 |
申请日期 |
2012.11.15 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
ITO, MASAHIRO;TSURUOKA, KAORI;KUWANA, YASUHIRO;NAGAI, YUSUKE |
分类号 |
C08F290/06;B23K26/00;B23K26/36;B23K26/38;C08L71/10;H01L21/302;H01L21/312;H01L21/768;H01L23/532 |
主分类号 |
C08F290/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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