| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently perform the cooling of a polishing pad and slurry and the dressing of a surface of the polishing pad. <P>SOLUTION: According to one embodiment, a polishing method includes steps of: pressing a substrate rotated against a rotating polishing pad 13 and supplying slurry on the polishing pad 13; measuring a surface temperature of the polishing pad 13; and when the surface temperature is not lower than a predetermined temperature, jetting a jet stream containing supercooled droplets from a nozzle 15 having a narrow portion toward the polishing pad 13. <P>COPYRIGHT: (C)2013,JPO&INPIT |
