| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow more stable detection of a position of a mark. <P>SOLUTION: A detector that detects a position of a mark in an image by template matching includes a processing unit that performs template matching to an image by using a template. When the degree of correlation obtained by the template matching does not satisfy an allowable condition, the processing unit performs template matching by using a template different from the template described above. <P>COPYRIGHT: (C)2013,JPO&INPIT |
