| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aspherical shape measurement device which is advantageous to the highly accurate measurement of an inspection surface having an aspherical shape. <P>SOLUTION: The aspherical shape measurement device includes: an illumination optical system 7 for irradiating an inspection surface 14 having an aspherical shape with rays of light emitted from a light source 1; a light shielding plate 6 for shielding a part of the rays of light with which the inspection surface is irradiated; an image pickup system having a sensor 10 for measuring a light flux to be reflected from the area of a part of the inspection surface irradiated with the rays of light via the illumination optical system and the light shielding plate; and calculation means for calculating the shape of the inspection surface from data measured by the sensor. The light shielding plate is configured to shield the opposite side of the area of a part of the inspection surface with respect to an optical axis, and when intersection points between a light flux to be reflected from the area of a part of the inspection surface and the optical axis are set to a plurality of measurement light intersection points, the light shielding plate is arranged between a measurement light intersection point 16 which is the closest to the inspection surface among the plurality of measurement intersection points and the inspection surface. <P>COPYRIGHT: (C)2013,JPO&INPIT |
