| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problems that time is taken for a method for determining inspection conditions while actually measuring signals, and determination of whether or not set sensitivity conditions are appropriate is affected by discretion of an operator in inspection equipment of a dark visual field system, etc. <P>SOLUTION: Inspection equipment has: a stage for holding a sample; an illumination optical system for irradiating the surface of the sample held on the stage with irradiation light; a dark field optical system for detecting diffused light generated by the irradiation light with which the sample is irradiated; a photoelectric conversion part which converts the diffused light detected by the dark field optical system into an electric signal; an AD conversion part which changes the electric signal converted by the photoelectric conversion part into a digital signal; a determination part which determines size of a foreign matter from size of the diffused light from the foreign matter on the sample surface; and a signal processing part which determines inspection conditions by using diffused light information from the sample surface. <P>COPYRIGHT: (C)2013,JPO&INPIT |
