| 发明名称 |
PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH ANNULAR-SHAPED COLLAPSED REGION |
| 摘要 |
<p>The present invention relates to a pre-collapsed capacitive micro -machined transducer cell (10) comprising a substrate (12) comprising a first electrode (16), a membrane (14) comprising a second electrode (18), wherein the cell has an outer region (22) where the membrane (14) is mounted to the substrate (12) and an inner region (20) inside or surrounded by the outer region (22), wherein the membrane (14) is collapsed to the substrate (12) in a first collapsed annular-shaped region (24) located within the inner region (20).</p> |
| 申请公布号 |
WO2013072803(A1) |
申请公布日期 |
2013.05.23 |
| 申请号 |
WO2012IB56152 |
申请日期 |
2012.11.05 |
| 申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
ROBINSON, ANDREW, LEE;FRASER, JOHN, DOUGLAS |
| 分类号 |
B06B1/02 |
主分类号 |
B06B1/02 |
| 代理机构 |
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| 主权项 |
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