发明名称 WAFER BONDING METHOD, AND ELECTRONIC DEVICE MANUFACTURED BY THE SAME
摘要 PURPOSE: A method for bonding a wafer and an electronic device manufactured thereby are provided to improve the bonding force of a semiconductor substrate by improving the planarization of a substrate. CONSTITUTION: A planarization substrate(11) is formed on a motherboard(12). The planarization substrate is separated from the motherboard. Metal bonding layers(13) are formed on the semiconductor substrate and the planarization substrate, respectively. The semiconductor substrate is bonded to the planarization substrate after two metal bonding layers are arranged to face each other.
申请公布号 KR20130053167(A) 申请公布日期 2013.05.23
申请号 KR20110118773 申请日期 2011.11.15
申请人 POSCO;POSTECH ACADEMY-INDUSTRY FOUNDATION 发明人 LEE, JONG LAM;SONG, YANG HEE
分类号 H01L21/02 主分类号 H01L21/02
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