发明名称 METHOD AND APPARATUS FOR ALIGNING CASSETTE
摘要 <P>PROBLEM TO BE SOLVED: To provide methods and devices for aligning a cassette for workpieces in an automated workpiece handling system. <P>SOLUTION: The method is for aligning a cassette handler to a robot blade in a workpiece handling system. The cassette handler has a support surface for supporting a workpiece cassette having a plurality of slots for carrying workpieces. The method comprises: placing a frame on the cassette handler support surface; moving a workpiece carried by the robot blade; and mapping the motion of the workpiece carried by the robot blade relative to the frame. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013102251(A) 申请公布日期 2013.05.23
申请号 JP20130047140 申请日期 2013.03.08
申请人 APPLIED MATERIALS INC 发明人 SCHAUER RON VERN;LAPPEN ALAN RICK
分类号 H01L21/677;B23Q3/18;B23Q17/24;H01L21/00;H01L21/673;H01L21/68 主分类号 H01L21/677
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