发明名称 |
METHOD AND APPARATUS FOR ALIGNING CASSETTE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide methods and devices for aligning a cassette for workpieces in an automated workpiece handling system. <P>SOLUTION: The method is for aligning a cassette handler to a robot blade in a workpiece handling system. The cassette handler has a support surface for supporting a workpiece cassette having a plurality of slots for carrying workpieces. The method comprises: placing a frame on the cassette handler support surface; moving a workpiece carried by the robot blade; and mapping the motion of the workpiece carried by the robot blade relative to the frame. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013102251(A) |
申请公布日期 |
2013.05.23 |
申请号 |
JP20130047140 |
申请日期 |
2013.03.08 |
申请人 |
APPLIED MATERIALS INC |
发明人 |
SCHAUER RON VERN;LAPPEN ALAN RICK |
分类号 |
H01L21/677;B23Q3/18;B23Q17/24;H01L21/00;H01L21/673;H01L21/68 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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