| 摘要 |
<P>PROBLEM TO BE SOLVED: To correct an assembly error of a shape measurement device in all X direction, Y direction and θ direction without replacing a tool for correction. <P>SOLUTION: In the case of correcting an assembly error of a shape measurement device including: a work support part 1; a laser displacement gage 2 for irradiating a peripheral edge of a work supported by the work support part 1 with a laser beam, receiving reflected rays of light, and outputting measurement data; an X direction movement part 4 for linearly moving the work support part 1 in an X direction; a Y direction movement part 5 for linearly moving the work support part 1 in a Y direction; and a θ direction movement part 6 for rotationally moving the work in a θ direction, a tool for correction having an arcuate peripheral edge for correcting assembly errors in the X and Y directions and a linear peripheral edge for correcting an assembly error in the θ direction is used. <P>COPYRIGHT: (C)2013,JPO&INPIT |
