发明名称 POLISHING AGENT AND POLISHING METHOD
摘要 The present invention relates to a polishing agent for polishing a surface to be polished of an object to be polished, the polishing agent including: first silicon oxide fine particles having an average primary particle size of 5 to 20 nm; second silicon oxide fine particles having an average primary particle size of 40 to 110 nm; and water, in which a ratio of the first silicon oxide fine particles to a total amount of the first silicon oxide fine particles and the second silicon oxide fine particles is from 0.7 to 30% by mass.
申请公布号 US2013130595(A1) 申请公布日期 2013.05.23
申请号 US201313737210 申请日期 2013.01.09
申请人 ASAHI GLASS COMPANY, LIMITED;ASAHI GLASS COMPANY, LIMITED 发明人 YOSHIDA YUIKO
分类号 B24B37/04 主分类号 B24B37/04
代理机构 代理人
主权项
地址