| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composition for imprint that forms a shaped inorganic thin film and a patterned inorganic thin film, and excels in the transferability of unevenness, and in which the crumble of the unevenness (pattern) by firing can be controlled. <P>SOLUTION: The composition for imprint forms an inorganic thin film by using the mold made of a resin formed by a silicone rubber, includes: a metal oxide particle; and a resin, wherein the content of the metal oxide particle is 10 mass%-99 mass% in a nonvolatile substance, and the content of the resin is 0.05 mass%-10 mass% in the nonvolatile substance. The resin includes a fluorine-containing resin. <P>COPYRIGHT: (C)2013,JPO&INPIT |
