| 摘要 |
<p>PURPOSE: A device for purifying trihalosilane is provided to minimize the consumption of energy and to obtain a high purity object from feed including trihalosilane. CONSTITUTION: A device for purifying trihalosilane comprises a partition type distillation tower and a first distillation tower connected to the partition type distillation tower. A tower top area, a preparatory separation area, a main separation area, and a tower bottom area are formed inside the partition type distillation tower. The partition type distillation tower comprises an inlet, a first outlet, a second outlet, and a third outlet. The second outlet is formed at 1/9-8/9 section of the partition section of the main separation area. The components flowed out from the second outlet are introduced into the first distillation tower. [Reference numerals] (AA) Location of a discharged point</p> |
