| 发明名称 |
Compositions and methods for texturing of silicon wafers |
| 摘要 |
<p>Pre-texturing composition for texturing silicon wafers having one or more surfactants. Methods of texturing silicon wafers having the step of wetting said wafer with a pre-texturing composition having one or more surfactants followed by a texturing step.
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| 申请公布号 |
EP2458622(A3) |
申请公布日期 |
2013.05.22 |
| 申请号 |
EP20110190545 |
申请日期 |
2011.11.24 |
| 申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
TAMBOLI, DNYANESH CHANDRAKANT;RAO, MADHUKAR BHASKARA;WU, AIPING |
| 分类号 |
C11D1/86;H01L21/306;H01L31/0236;H01L31/04;H01L31/18 |
主分类号 |
C11D1/86 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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