发明名称 PHASE CONTROLLED SUBLIMATION
摘要 <p>A method of forming a silicon carbon compound. A silicon source is introduced into an environment. Silicon particles are formed therefrom. One or more hydrocarbons are introduced into the environment separately from the silicon source, thereby forming one or more silicon carbon compounds. A dissociation enhancer may be introduced into the environment to minimize silicon particle size prior to it joining the hydrocarbon source.</p>
申请公布号 EP1634321(B1) 申请公布日期 2013.05.22
申请号 EP20040750801 申请日期 2004.04.27
申请人 CREE, INC. 发明人 KORDINA, OLOF CLAES ERIK
分类号 C30B25/14;C04B35/56;C04B35/565;C30B23/00;C30B23/02;C30B29/36 主分类号 C30B25/14
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