发明名称 ROTARY TARGET BACKING TUBE BONDING ASSEMBLY
摘要 <p>A rotary sputtering target bonded to a backing tube such that the bonding material is applied only proximate the ends of the rotary sputtering target and is also between the target and the backing tube to form a gap between the rotary sputtering target and the backing tube and a device for bonding a rotary sputtering target to a backing tube.</p>
申请公布号 EP2593578(A2) 申请公布日期 2013.05.22
申请号 EP20110807344 申请日期 2011.07.11
申请人 MATERION ADVANCED MATERIALS TECHNOLOGIES AND SERVICES INC. 发明人 WITYAK, GEORGE, MICHAEL;COX, LUTHER, WILBURN
分类号 C23C14/34;C23C14/16 主分类号 C23C14/34
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