发明名称 A CONTACT SHEET FOR ARRANGEMENT BETWEEN A CHUCK AND A MASTER ELECTRODE IN AN ECPR PROCESS
摘要 <p>A contact sheet (100) for making electrical contact to a master electrode in an ECPR process is provided. Said contact sheet (100) has a first proximal side (101) and a second distal side (102). The contact sheet (100) comprises an insulating carrier sheet (103), distal electrically conductive contact portions (110) arranged distally of the insulating carrier sheet (103), and proximal electrically conductive contact portions (105) arranged proximally of the insulating carrier sheet (103). The distal and proximal electrically conductive contact portions (105, 110) are connected by an electrically conductive material through the insulating carrier sheet (103).</p>
申请公布号 EP2593588(A1) 申请公布日期 2013.05.22
申请号 EP20110743801 申请日期 2011.07.13
申请人 CENTRE DE RECHERCHE PUBLIC - GABRIEL LIPPMANN 发明人 MÖLLER, PATRIK;FREDENBERG, MIKAEL;UTTERBÄCK, TOMAS;SANTOS, ANTONIO;CHAUVET, JEAN-MICHEL;LINDGREN, LENNART;ROSÉN, DANIEL;SVENSSON, STEFAN
分类号 C25D7/12;C25D17/00;C25D17/10;H01L21/683 主分类号 C25D7/12
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