发明名称 |
CHARGED PARTICLE COLLECTOR FOR A CMOS IMAGER |
摘要 |
<p>Charged particle sensing devices and methods of forming charged particle sensing devices are provided. The charged particle sensing device includes a source of charged particles, a plurality of collector electrodes for receiving a first portion of the charged particles and a grid formed around and spaced apart from the plurality of collector electrodes. The grid receives a second portion of the charged particles and directs backscattered charged particles, generated responsive to the second portion, to adjacent collector electrodes.</p> |
申请公布号 |
EP2593956(A2) |
申请公布日期 |
2013.05.22 |
申请号 |
EP20110746058 |
申请日期 |
2011.07.11 |
申请人 |
EXELIS INC. |
发明人 |
CHILCOTT, DAN, WESLEY;BANEY, WILLIAM, J.;TROXELL, JOHN, RICHARD |
分类号 |
H01J31/58;H01J9/233;H01J29/39 |
主分类号 |
H01J31/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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