发明名称 Extendable electrode for gas discharge laser
摘要 A movable electrode assembly for use in laser system includes a first electrode, a second electrode arranged opposite from the first electrode, the second electrode being spaced apart from the first electrode by a discharge gap and a discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A movable electrode assembly for integration into a housing of a laser system includes a first electrode having a discharge surface, a second electrode having a discharge surface, such that the discharge surface of the first electrode and the discharge surface of the second electrode face each other in a spaced apart setting that defines a desired discharge gap, and a mechanism for moveably adjusting the spaced apart setting toward the desired discharge gap. A method of adjusting a discharge gap is also disclosed.
申请公布号 US8446928(B2) 申请公布日期 2013.05.21
申请号 US20100945719 申请日期 2010.11.12
申请人 SANDSTROM RICHARD L.;CHUNG TAE (MARK) H.;UJAZDOWSKI RICHARD C.;CYMER, INC. 发明人 SANDSTROM RICHARD L.;CHUNG TAE (MARK) H.;UJAZDOWSKI RICHARD C.
分类号 H01S3/097 主分类号 H01S3/097
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