发明名称 |
Apparatus of plural charged particle beams with multi-axis magnetic lens |
摘要 |
An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface. |
申请公布号 |
US8445862(B2) |
申请公布日期 |
2013.05.21 |
申请号 |
US20100968221 |
申请日期 |
2010.12.14 |
申请人 |
CHEN ZHONGWEI;REN WEIMING;KANAI KENICHI;LIU XUEDONG;HERMES MICROVISION, INC. |
发明人 |
CHEN ZHONGWEI;REN WEIMING;KANAI KENICHI;LIU XUEDONG |
分类号 |
H01J37/143 |
主分类号 |
H01J37/143 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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