发明名称 |
Mass flow controller verifying system, verifying method and verifying program |
摘要 |
In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.
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申请公布号 |
US8443649(B2) |
申请公布日期 |
2013.05.21 |
申请号 |
US20100721433 |
申请日期 |
2010.03.10 |
申请人 |
YASUDA TADAHIRO;YAMAGUCHI YUJI;HORIBA STEC, CO., LTD. |
发明人 |
YASUDA TADAHIRO;YAMAGUCHI YUJI |
分类号 |
G01F25/00;G05B23/00;G05B23/02 |
主分类号 |
G01F25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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