发明名称 |
Antireflective coating composition and process thereof |
摘要 |
The invention related to an antireflective coating comprising a mixture of a first polymer and a second polymer, and a thermal acid generator, where the first polymer comprises at least one fluoroalcohol moiety, at least one aliphatic hydroxyl moiety, and at least one acid moiety other than fluoroalcohol with a pKa in the range of about 8 to about 11; where the second polymer is a reaction product of an aminoplast compound with a compound comprising at least one hydroxyl and/or at least one acid group. The invention further relates to a process for using the novel composition to form an image.
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申请公布号 |
US8445181(B2) |
申请公布日期 |
2013.05.21 |
申请号 |
US20100792994 |
申请日期 |
2010.06.03 |
申请人 |
YAO HUIRONG;YIN JAIN;LIN GUANYANG;NEISSER MARK;ABDALLAH DAVID;AZ ELECTRONIC MATERIALS USA CORP. |
发明人 |
YAO HUIRONG;YIN JAIN;LIN GUANYANG;NEISSER MARK;ABDALLAH DAVID |
分类号 |
G03F7/30;C09D5/33;C09D125/02;C09D133/14;C09D179/04;C09D179/08 |
主分类号 |
G03F7/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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