| 摘要 |
There is provided a piezoelectric actuator including: a substrate that is supported by a support portion; a piezoelectric element that includes a lower electrode formed on the substrate, a piezoelectric layer formed on the lower substrate, and an upper electrode formed on the piezoelectric layer; and a driving circuit that applies a voltage to the piezoelectric element. The upper electrode has a first upper electrode that is positioned on an outer peripheral side of the piezoelectric layer and at least one second upper electrode that is positioned on a center side of the piezoelectric layer, and a voltage applied to the first upper electrode is lower than a voltage applied to the second upper electrode.
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