| 摘要 |
<p>PURPOSE: A substrate transferring apparatus is provided to improve the yield of a substrate by preventing impurities due to the contact between a guide roller and the side of the substrate. CONSTITUTION: A substrate is transferred by rotating a bottom roller(110) in contact with the lower side of the substrate. A transfer shaft(120) is extended in a vertical direction to a substrate transfer direction. The bottom roller is installed in the transfer shaft. The transfer shaft rotates by receiving an external driving power. A top roller(310) faces the bottom roller. The substrate is supported by the bottom roller and the top roller. The top roller rotates in contact with the upper side of the substrate to prevent the substrate from being separated.</p> |
