发明名称 |
Hybrid MEMS RF switch and method of fabricating same |
摘要 |
Structures having a hybrid MEMS RF switch and method of fabricating such structures using existing wiring layers of a device is provided. The method of manufacturing a MEMS switch includes forming a forcing electrode from a lower wiring layer of a device and forming a lower electrode from an upper wiring layer of the device. The method further includes forming a flexible cantilever arm over the forcing electrode and the lower electrode such that upon application of a voltage to the forcing electrode, the flexible cantilever arm will contact the lower electrode to close the MEMS switch.
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申请公布号 |
US8445306(B2) |
申请公布日期 |
2013.05.21 |
申请号 |
US20080343533 |
申请日期 |
2008.12.24 |
申请人 |
LINDGREN PETER J.;STAMPER ANTHONY K.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LINDGREN PETER J.;STAMPER ANTHONY K. |
分类号 |
H01L21/00;H01L29/84 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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