| 发明名称 |
Lithographic apparatus and a method of measuring flow rate in a two phase flow |
| 摘要 |
A lithographic apparatus is disclosed that includes a conduit for two phase flow therethrough. A flow separator is provided to separate the two phase flow into a gas flow and a liquid flow. A flow meter measures the flow rate of fluid in the gas flow or the liquid flow.
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| 申请公布号 |
US8446561(B2) |
申请公布日期 |
2013.05.21 |
| 申请号 |
US20100820448 |
申请日期 |
2010.06.22 |
| 申请人 |
KRAMER PIETER JACOB;VAN DER NET ANTONIUS JOHANNUS;EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA;KUIJPER ANTHONIE;ASML NETHERLANDS B.V. |
发明人 |
KRAMER PIETER JACOB;VAN DER NET ANTONIUS JOHANNUS;EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA;KUIJPER ANTHONIE |
| 分类号 |
G03B27/52;G03B27/42 |
主分类号 |
G03B27/52 |
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