METHOD OF TESTING AN OBJECT AND APPARATUS FOR PERFORMING THE SAME

摘要

PURPOSE: An inspecting method and an apparatus are provided to reduce a reinspection time of abnormal subjects by directly reimporting the subjects, which are determined to be abnormal, from an exporting unit to an inspecting unit, and reduce an inspection time by excluding a heating waiting time since the follow-up subjects are heated by a first heating member by arranging a second heating member in the exporting unit. CONSTITUTION: An inspecting method comprises a step(ST204) of importing subjects into an inspecting unit through an exporting unit; a step(ST206) of inspecting the subjects within the inspecting unit; a step(ST208) of exporting the inspected subjects from the inspecting unit to the exporting unit; a step(ST212) of reimporting the subjects determined to be abnormal from the exporting unit to the inspecting unit; and a step(ST218) of reinspecting the abnormal subjects within the inspecting unit. [Reference numerals] (AA) Start; (BB) End; (ST202) Transfer semiconductor packages from an importing stocker to an importing shuttle; (ST204) Import the importing shuttle to an inspecting unit; (ST206) Inspect the semiconductor packages; (ST208) Export an exporting shuttle with the inspected semiconductor packages from the inspecting unit; (ST210) Transfer the inspected semiconductor packages from the exporting shuttle to an exporting tray; (ST212) Retransfer the abnormal semiconductor packages to the exporting shuttle; (ST214) Import following semiconductor packages to an importing unit; (ST216) Reimport the exporting shuttle to the inspecting unit; (ST218) Reinspect the abnormal semiconductor packages; (ST220) Export the exporting shuttle with the reinspected semiconductor packages to the inspecting unit; (ST222) Transfer the reinsepcted semiconductor packages from the exporting shuttle to the exporting tray; (ST224) Finally classify the normal semiconductor packages and the abnormal semiconductor packages and store in an exporting stocker