发明名称 LIQUID INJECTION HEAD, LIQUID INJECTION DEVICE AND PIEZOELECTRIC ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a liquid injection head, a liquid injection device and a piezoelectric element which have small environmental loads and high voltage resistance. <P>SOLUTION: A liquid injection head comprises piezoelectric elements 300 each of which is provided with a first electrode 60, a piezoelectric layer 70 and a second electrode 80. The piezoelectric layer 70 is made of a complex oxide which has a perovskite-type structure containing Bi, Ba, Fe and Ti. In X-ray photoelectron spectroscopy measurement, binding energy of C-C and C-H states of a peak due to C 1s is standardized as 284.8 eV. When a peak obtained within a range of the binding energy of 775 eV or more and 785 eV or less is peak-separated by using a Gaussian function, the piezoelectric layer 70 has one or more peaks with intensity lower than that of a peak at 779.0&plusmn;0.8 eV at a high binding energy side while having the peak at 779.0&plusmn;0.8 eV. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013098441(A) 申请公布日期 2013.05.20
申请号 JP20110241707 申请日期 2011.11.02
申请人 SEIKO EPSON CORP 发明人 KITADA KAZUYA;OMOTO MASAYUKI
分类号 H01L41/09;B41J2/045;B41J2/055;H01L41/18;H01L41/187;H01L41/22;H01L41/39 主分类号 H01L41/09
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