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发明名称
SPUTTERING APPARATUS
摘要
<p>스퍼터 장치가 개시된다. 본 발명의 스퍼터 장치는, 기판에 대한 증착 공정이 진행되며, 내부에 복수의 타겟이 배치되는 공정 챔버; 및 상기 공정 챔버 내에서 상기 복수의 타겟을 지지 가능하게 마련되되, 상기 공정 챔버에 일체로 탈착 가능하게 결합되는 적어도 하나의 타겟지지조립체를 포함한다.</p>
申请公布号
KR101263336(B1)
申请公布日期
2013.05.20
申请号
KR20110055299
申请日期
2011.06.08
申请人
发明人
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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