发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>PURPOSE: A semiconductor device and a manufacturing method thereof are provided to reduce power consumption by injecting impurities for controlling a threshold voltage into a gate insulation layer. CONSTITUTION: A gate insulation layer is formed on a substrate and includes impurities for controlling a threshold voltage. The substrate includes an NMOSFET region. The impurities for controlling the threshold voltage include nitrogen. A metal electrode(45) is formed on the gate insulation layer. An interfacial layer(43) is formed between the substrate and the gate insulation layer.</p> |
申请公布号 |
KR20130051283(A) |
申请公布日期 |
2013.05.20 |
申请号 |
KR20110116543 |
申请日期 |
2011.11.09 |
申请人 |
SK HYNIX INC. |
发明人 |
JI, YUN HYUCK;KIM, BEOM YONG |
分类号 |
H01L29/78;H01L21/336;H01L27/092 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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