| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gyro sensor having excellent sensitivity characteristics and band characteristics. <P>SOLUTION: A gyro sensor 100 according to the present invention includes: a drive section 110 provided with a drive support section 112 connected to a drive spring section 114; and a detector 120 provided with a detection support section 122 connected to the drive support section 112 via a detection spring section 124. The drive support section 112 can vibrate in a direction of a first axis (X-axis). The detection support section 122 is displaceable in a direction of a second axis (Y-axis) perpendicular to the first axis (X-axis). When a resonant frequency of the drive section 110 is represented by f<SB POS="POST">1</SB>, a resonant frequency of the detector 120 is represented by f<SB POS="POST">2</SB>, a width of the drive spring section 114 is represented by w<SB POS="POST">1</SB>and a width of the detection spring section 124 is represented by w<SB POS="POST">2</SB>, f<SB POS="POST">1</SB>, f<SB POS="POST">2</SB>, w<SB POS="POST">1</SB>and w<SB POS="POST">2</SB>satisfy the following expression (1): 0.87(f<SB POS="POST">2</SB>/f<SB POS="POST">1</SB>)≤(w<SB POS="POST">2</SB>/w<SB POS="POST">1</SB>)≤1.13(f<SB POS="POST">2</SB>/f<SB POS="POST">1</SB>), where w<SB POS="POST">1</SB>≠w<SB POS="POST">2</SB>and f<SB POS="POST">1</SB>≠f<SB POS="POST">2</SB>. <P>COPYRIGHT: (C)2013,JPO&INPIT |
