| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a clean robot capable of actualizing the fast and smooth movement of a working shaft. <P>SOLUTION: A lower bellows member 50 is configured to extend outward from a cover 31 as one end side of a working shaft 32 extends from the cover, and an upper bellows member 52 is configured to extend inward from the cover 31 as the one end side of the working shaft 32 extends from the cover 31. <P>COPYRIGHT: (C)2013,JPO&INPIT |
