| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus in which equipment for easily irradiating an object to be inspected with light necessary for inspection can be made simple. <P>SOLUTION: The invention relates to an inspection apparatus which is electrically connected to an object to be inspected having a light receiving part and electrodes by means of a probe card to perform inspection processing on the object to be inspected. The probe card has a contact element to be in electrical connection with the object to be inspected, a substrate electrically connected with the contact element, and an illumination unit arranged on a board surface of the substrate same as the board surface on which the contact element is arranged and having a light source that can emit light to the object to be inspected. <P>COPYRIGHT: (C)2013,JPO&INPIT |
