| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a plasma generator of the present invention from having a shift in matching which is caused by a reduced size of the generator and an increase in temperature. <P>SOLUTION: A plasma generator 1 comprises: a discharge tube 11 disposed in the vicinity of an antenna 10; a radio frequency power supply 13 that supplies the antenna 10 with radio frequency power; a matching circuit unit 14; and a phase adjusting unit 15. The phase adjusting unit 15 includes coils 23A and 23B formed by winding a conductor wire 25 around a hollow core tube 24 in such a way that the conductor wire 25 is accommodated in a spiral groove 24b formed in an outer periphery of the hollow core tube 25. <P>COPYRIGHT: (C)2013,JPO&INPIT |
