| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate formation of a plurality of highly fine aperture patterns and maintain the shape and position of the aperture patterns even during handling. <P>SOLUTION: A holding member 1 is formed by providing a plurality of penetrating openings 6 of a shape larger than a thin film pattern to a plate magnetic metal material. A resin film 2 that transmits visible light is firmly attached to one surface of the holding member 1 and held. After the holding member 1 is positioned for a substrate 3 placed on the first magnetic chuck 17, the holding member 1 is absorbed with magnetic force and the film 2 is firmly attached to the surface of the substrate 3. A laser beam is radiated to the film 2 part in the opening 6 of the holding member 1, and the penetrating aperture pattern 4 of the same shape as the thin film pattern is formed. The holding member 1 is absorbed by magnetic force of the second magnetic chuck 18, and the holding member 1 and the film 2 are integrally peeled from the substrate 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
