发明名称 SPHERICAL BODY MOUNTING APPARATUS AND SPHERICAL BODY MOUNTING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To reduce generation of a defective article caused by positional displacement between a position where a spherical body is mounted, and a target mount position. <P>SOLUTION: A spherical body mounting apparatus comprises a suction head 11 which sucks a spherical body, a substrate conveying section 4 which is configured to support a substrate 400 and to change a position of the substrate 400 being supported, a mounting section 3 which mounts the spherical body at a target mount position on the substrate 400 by moving the suction head 11 sucking the spherical body, a control section which controls the substrate conveying section 4 and the mounting section 3, and an inspection section which inspects the propriety of a mounting state of the spherical body on the basis of a captured image of the substrate 400 on which the spherical body is mounted. The control section identifies a correction value for correcting positional displacement between a position where the spherical body is mounted, and the target mount position on the basis of the captured image used for the propriety inspection and corrects the positional displacement by increasing/decreasing the amount to change the position of the substrate 400 by means of the substrate conveying section 4 and a distance to move the suction head 11 by means of the mounting section 3 on the basis of the correction value, in mount processing to be executed after the propriety inspection. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013098474(A) 申请公布日期 2013.05.20
申请号 JP20110242282 申请日期 2011.11.04
申请人 HIOKI EE CORP 发明人 KOBAYASHI MASASHI
分类号 H01L21/60;H01L23/12;H05K3/34 主分类号 H01L21/60
代理机构 代理人
主权项
地址