| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily manufacture an aspherical concave lens through a relatively small number of steps by a wet etching system. <P>SOLUTION: An aspherical concave portion defining a curved surface of a concave lens is formed on a substrate through a step of forming, on the substrate on which the concave portion for the concave lens is to be formed, a mask layer having etching rates different from those of the substrate with respect to prescribed kinds of etchants, a step of forming an aperture in a position of the mask layer corresponding to the center of the concave portion for the concave lens to be formed on the substrate, and a step of wet etching with the prescribed kinds of etchants via the mask layer. A step of controlling a close contact state between a surface of the substrate and the mask layer is included in the step of forming the mask layer and/or the step of wet etching. <P>COPYRIGHT: (C)2013,JPO&INPIT |
