PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS AND LONG OBJECT SUBJECTED TO PLASMA PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide a plasma processing method capable of performing uniform surface treatment of a long workpiece thoroughly, and to provide a plasma processing apparatus using the plasma processing method and exhibiting excellent operability.

SOLUTION: A guide consisting of a plurality of disc-like guide members 5a arranged in the longitudinal direction of a first cylindrical part 2 is provided. At least one bearing hole 5c is formed to penetrate the guide member 5a in the thickness direction. A long workpiece W is inserted into the bearing hole 5c and supported, and then guide to a region where the density of plasma is high, i.e., the vicinity of the inner wall of the first cylindrical part 2.

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