| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning device capable of removing sediment over a wide region of an electrode constituting an extraction electrode system of an ion source at high speed. <P>SOLUTION: A cleaning device includes means, such as cleaning gas source 42 for supplying cleaning gas 48 between two electrodes 11, 12 mutually facing each other of an extraction electrode system 10 to keep gas pressure between the electrodes in gas pressure for generating glow discharge, and a glow discharge power source 60 for applying direct current voltage between both electrodes 11, 12 to generate glow discharge 80. The cleaning device also includes an abnormal discharge measuring instrument 84 for measuring the occurrence number N of abnormal discharges between the electrodes 11, 12 within a prescribed time, and a power supply controller 86 for performing control that increases/decreases output current I<SB POS="POST">g</SB>of the glow discharge power source 60 by prescribed width at a time by using the occurrence number N of abnormal discharges measured by the abnormal discharge measuring instrument. <P>COPYRIGHT: (C)2013,JPO&INPIT |
