| 摘要 |
<P>PROBLEM TO BE SOLVED: To avoid increase of a driving voltage and characteristic reduction by reducing a stress which is applied to a piezoelectric thin film during polarizing processing and performing the polarizing processing on the piezoelectric thin film up to near an interface with a ground layer, in a piezoelectric element which is driven according to a d<SB POS="POST">33</SB>system. <P>SOLUTION: A piezoelectric element comprises a substrate including an opening, a diaphragm, a piezoelectric thin film, and a plurality of electrodes. The diaphragm is formed on the substrate so as to cover the opening. The piezoelectric thin film is formed at a side opposed to the substrate with respect to the diaphragm and vibrates the diaphragm. The plurality of electrodes are provided so as to apply an electric field to the piezoelectric thin film approximately in an intra-plane direction, The piezoelectric thin film is comprised of a (001) orientation film of a rhombohedral crystal. <P>COPYRIGHT: (C)2013,JPO&INPIT |
