| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve efficiency in detecting X-rays generated by electron beam irradiation on a sample and to detect an X-ray signal having a high S/N ratio in an energy dispersion type x-ray detector. <P>SOLUTION: An energy dispersion type X-ray detector includes: a semiconductor detection element for detecting X-rays; a detector chamber for accommodating the semiconductor detection element therein and keeping the element under vacuum atmosphere; a thin film disposed so as to seal an opening in the detector chamber for introducing X-rays, and configured to transmit X-rays; and a reinforcement member for supporting the thin film from inside of the detector chamber. The reinforcement member includes gaps formed by plural rib-like members disposed in parallel to one another with spaces therebetween. A magnetic field is generated between the plural rib-like members by incorporating permanent magnets into the plural rib-like members or by configuring the rib-like members with permanent magnets. <P>COPYRIGHT: (C)2013,JPO&INPIT |
