| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method to measure the coefficient of thermal expansion (CTE) of a thin film-like material with improved reproducibility. <P>SOLUTION: The method of measuring a coefficient of thermal expansion includes the steps of: holding both ends of a test piece with holding members; changing temperature of the held test piece; and measuring the amount of expansion and contraction of the test piece corresponding to the temperature change. In a state where microparticles are present between at least one of the holding members and the test piece, the holding is performed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
