| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ion beam extracting electrode capable of easily extracting a desired ion beam from an ion source by making an exudation amount of an electric field small, and an ion source provided with the ion beam extracting electrode. <P>SOLUTION: An ion beam extracting electrode 1 includes an electrode frame body 2 having an opening part 3 in the center thereof, and a plurality of ion extraction hole formation members 7 arranged in one direction with a gap provided from each other, at least one end part of which is supported movably in the opening part 3. At least one of the ion extraction hole formation members 7 is a structure having an almost rod-like body part 5 and a crossover part 6 extended from the body part 5, and the crossover part 6 constituting one ion extraction hole formation member 7 is brought into contact with another ion extraction hole formation member 7 arranged adjacently. In addition, in the configuration of the ion source, at least one ion beam extracting electrode 1 or more are provided adjacently to a plasma container provided with a cathode inside. <P>COPYRIGHT: (C)2013,JPO&INPIT |
