MULTIPLICATION SYSTEM OF FLIP CHIP MOUNTERS

摘要

PURPOSE: A multiplication system for a flip chip mounter is provided to smoothly transfer a substrate by arranging a plurality of flip chip mounters in a line. CONSTITUTION: A plurality of flip chip mounters(110,130) are arranged in a line. A first wafer transfer device(310,320,330) is located on one side of the flip chip mounter and supplies a wafer to the flip chip mounter. A first shuttle conveyor(410,420,430) transfers a substrate on the upper side of the first wafer transfer device in a second direction. A second shuttle conveyor(210,220,230) transfers the substrate on the upper side of the flip chip mounter in the second direction.